MSB Series Medium Frequency Sputtering Power Supply
Vaega
Fa'apipi'i fata
Tali vave arc, taimi tali<100ns
E maualalo le malosi e teu ai, <0.5mJ/KW
Tele-vaega interleaved PFC tekinolosi, o le malosiaga e maualuga e pei ole0.95
E mafai ona filifilia auala eseese, fa'aauau ma fa'alavelave
O le Inverter circuit e faʻaaogaina tekinolosi faʻafefete atoatoa ma faʻaaogaina le tolu-tupulaga semiconductor SiC e avea ma masini eletise, ma sili ona lelei.
Sa'o arc su'esu'ega, tele auala mata'ituina avanoa
Fa'amatalaga Oloa
| Fa'asinomaga | MSB1040(20*2) | MSB1030  
  |  
| Ulufale | ||
| Volosa fa'aofi  
  |  3AC400V, 50/60Hz  
  |  3AC400V, 50/60Hz  
  |  
| Tulaga malosi  
  |  20kW  
  |  30kw  
  |  
| Faiga fa'avae  
  |  2 alavai  
  |  1 alavai  
  |  
| Tuuina atu | ||
| Le maualuga o le gaosiga o lo'o i ai nei  
  |  50A*2  
  |  80A  
  |  
| Tulaga aupito maualuga volt  
  |  600V*2  
  |  600V  
  |  
| Fa'ailoga fa'apitoa | ||
| Malosiaga  
  |  0.95  
  |  0.95  
  |  
| Fa'aliliuga lelei  
  |  94% I lalo o le tulaga fa'atatau | 94% I lalo o le tulaga fa'atatau | 
| Fetuuna'iga sa'o  
  |  ±0.5%  
  |  ±0.5%  
  |  
| Taimi tali a Arc  
  |  <100ns  
  |  <100ns  
  |  
| Tele  
  |  4U  
  |  4U  
  |  
| Fesootaiga  
  |  Standard RS485/RS232(Profibus, Profinet, DeviceNET, EtherCAT faitalia) | |
Tusi lau savali iinei ma lafo mai ia i matou
         		         		    
                 



