MSD Series Sputtering Power Supply
Vaega
● Fa'apipi'i fata
● Tali vave arc, taimi tali <100ns
● Lalo e teu ai le malosi, <1mJ/kW
● Faiga faʻapipiʻi faʻapipiʻi, 3U taʻavale masani
● faʻaaliga faʻaalia Saina / Igilisi, faigofie ona faʻaogaina
● Pulea tonu
● Tele ituaiga o galuega faatino
● galuega puipuia atoatoa
Fa'amatalaga Oloa
| Ulufale | Volosa fa'aofi: 3AC380V±10% |
| Malosiaga: 20kW, 30kW Fa'aaofia le malosi fa'atele: 50Hz/60Hz | |
| Tuuina atu | Max. voluma gaosiga: 800V |
| Max. galuega faatino i le taimi nei: 50A, 75A | |
| Ga'ega o lo'o iai nei: ≤3% rms | |
| Galulue Voltage Output: ≤2% rms | |
| Fa'ailoga fa'apitoa | Voli fa'amumu: 1000V / 1200V faitalia |
| Fa'aliliuga lelei: 95% | |
| Taimi e alu ese ai: <100ns | |
| Feso'ota'iga feso'ota'iga: Standard RS485 / RS232 (PROFIBUS, PROFINET, DeviceNet ma EtherCAT e filifili) | |
| Fua(H*W*D)mm: 132*482*560: 176*482*700 | |
| Fa'alili faiga: fa'alili ea | |
| Manatua: o loʻo faʻaauau pea ona faʻafouina le oloa ma faʻaauau pea ona faʻaleleia le faʻatinoga. O lenei fa'amatalaga fa'amaufa'ailoga e mo na'o fa'amatalaga. | |
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