MSB Series Medium Frequency Sputtering Power Supply
Vaega
Fa'apipi'i fata
Tali vave arc, taimi tali<100ns
E maualalo le malosi e teu ai, <0.5mJ/KW
Tele-vaega interleaved PFC tekinolosi, o le malosiaga e maualuga e pei ole0.95
E mafai ona filifilia auala eseese, fa'aauau ma fa'alavelave
O le Inverter circuit e faʻaaogaina tekinolosi faʻafefete atoatoa ma faʻaaogaina le tolu-tupulaga semiconductor SiC e avea ma masini eletise, ma sili ona lelei.
Sa'o arc su'esu'ega, tele auala mata'ituina avanoa
Fa'amatalaga Oloa
Fa'asinomaga | MSB1040(20*2) | MSB1030
|
Ulufale | ||
Volosa fa'aofi
| 3AC400V, 50/60Hz
| 3AC400V, 50/60Hz
|
Tulaga malosi
| 20kW
| 30kw
|
Faiga fa'avae
| 2 alavai
| 1 alavai
|
Tuuina atu | ||
Le maualuga o le gaosiga o lo'o i ai nei
| 50A*2
| 80A
|
Tulaga aupito maualuga volt
| 600V*2
| 600V
|
Fa'ailoga fa'apitoa | ||
Malosiaga
| 0.95
| 0.95
|
Fa'aliliuga lelei
| 94% I lalo o le tulaga fa'atatau | 94% I lalo o le tulaga fa'atatau |
Fetuuna'iga sa'o
| ±0.5%
| ±0.5%
|
Taimi tali a Arc
| <100ns
| <100ns
|
Tele
| 4U
| 4U
|
Fesootaiga
| Standard RS485/RS232(Profibus, Profinet, DeviceNET, EtherCAT faitalia) |
Tusi lau savali iinei ma lafo mai ia i matou