MSB Series Medium Frequency Sputtering Power Supply

MSB Fa'asologa Medium Frequency Sputtering Power Supply Ata Fa'aalia

Fa'amatalaga Puupuu:

RHH fa'asologa RF sapalai eletise e fa'alagolago i luga o tekinolosi fa'atupu RF matua e tu'uina atu i tagata fa'atau le sapalai eletise RF ma le malosi sili atu, maualuga maualuga ma tali vave.Fa'atasi ai ma le vaega e mafai ona seti, fa'atonuina le pusi, fa'alogo numera ma isi galuega.Fa'atatauga fanua: alamanuia photovoltaic, fale mafolafola fa'aaliga alamanuia, semiconductor alamanuia, kemikolo alamanuia, falesuesue, su'esu'ega faasaienisi, gaosiga, ma isi.

Faiga talafeagai: plasma faʻaleleia ausa vailaʻau faʻamaʻi (PECVD), plasma etching, faʻamamaina o le plasma, faʻapogai o le leitio faʻasalalau, faʻasalalauina o le plasma, polymerization plasma sputtering, reactive sputtering, ma isi.

Fa'amatalaga Oloa

Faailoga o oloa

Auina imeli ia matou

Vaega

● Sitaili fa'apipi'i afa piliki ma fata

● Faʻaaogaina faʻatonuga numera atoa, faʻatasi ai ma le faʻaogaina o le lisi faigofie ma le tamaoaiga

● Fa'alogo fa'atele, fa'agaioiga fa'atasi ma le fa'agaoioiga

● Fa'atasi ai ma galuega fa'atasi vaega CEX

● galuega puipuia atoatoa

Fa'amatalaga Oloa

Ulufale	Volosa fa'aulu: AC220V±10% 3ΦAC380V±5%(E mafai ona fa'avasegaina fa'amatalaga fa'apitoa)
Ulufale	Auala fa'aofi: 47~63Hz
Tuuina atu	Fa'aoso fa'alava: 13.56MHz,27.12MHz,40.68MHz
	Va'aiga fa'alogo: ±5%
	Mana fa'aoso: 1.5~5kW
	Fa'atonuga o le malosiaga fa'aulufale: 1~100%
	Fa'alavelave fa'aletonu: 50Ω+j0
	Fa'aulufalega: ituaiga N
	Faiga fa'aoso: fa'aauau, fa'atosina
	Fa'atosina fa'asolo: 100Hz~100kHz
	Ta'amilosaga tiute: 5~95%
Fa'ailoga o galuega	Malosiaga: 0.98
	Sa'o le mautu o taimi: ±0.005%
	Malosiaga: 75% (i le fua fa'atatau)
	Fa'atasi: ＜-45dBc
	Sese: ＜-50dBc
	Fa'atonuga fa'apitoa i fafo: numera analog, feso'ota'iga ma fa'atasi
	Feso'ota'iga auala: Fa'asalalauga feso'ota'iga RS485;Filifiliga Ether CAT, Ethernet fale gaosimea, ma isi.
Manatua: o loʻo faʻaauau pea ona faʻafouina le oloa ma faʻaauau pea ona faʻaleleia le faʻatinoga.O lenei fa'amatalaga fa'amaufa'ailoga e mo na'o fa'amatalaga.